Author Affiliations
Abstract
State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
In order to improve the morphology of microchannels fabricated by femtosecond laser ablation, the thermal process was introduced into the post-treatment processing. It was found that the thermal process cannot only decrease the roughness but also the width and depth of the microchannel. The change rates of width, depth, and roughness of the microchannel increase with processing temperature. When we prolong the time of constant temperature, the change rate of the width decreases at the beginning, and then it tends to be stable. However, the change rates of depth and roughness increase, and then they tend to be stable. In this Letter, we discuss the reasons of the above phenomena.
140.3390 Laser materials processing 230.7380 Waveguides, channeled Chinese Optics Letters
2018, 16(10): 101402
中南大学 高性能复杂制造国家重点实验室, 湖南 长沙 410083
恒弹性合金因其在一定温度范围内弹性模量几乎不随温度变化的特点, 在精密仪器仪表等制造领域应用越来越广泛, 其表面加工的要求也越来越高。为研究飞秒激光在不同加工环境下对恒弹性合金的烧蚀情况, 对比了两种加工条件不同的烧蚀实验。空气环境中; 用150 μm薄玻璃片压贴在样品表面, 烧蚀方式分为定点烧蚀和刻槽两种, 用共聚焦显微镜和扫描电镜测量了烧蚀后的恒弹合金形貌。结果表明, 采用定点烧蚀的加工方式时, 相同激光参数下, 空气中烧蚀坑的直径最小, 深度最大; 玻璃片约束下的坑的直径最大, 深度最小, 当激光能量为50 μJ, 脉冲数为100个时, 该约束下烧蚀坑的深度缩减量可达44.0%。采用刻槽的加工方式时, 在空气中的槽的深度大, 宽度较大, 在玻璃片的约束下, 加工的槽的深度和宽度都减小, 当激光能量为50 μJ、扫描速度为1.5 mm/s时, 其深度缩减量可达47.2%。
飞秒激光 脉冲烧蚀 刻槽烧蚀 恒弹合金 表面形貌 femtosecond laser pulse ablation groove ablation constant elastic alloy surface morphology
